- line-edge roughness
- Нанотехнологии: размытие края изображения
Универсальный англо-русский словарь. Академик.ру. 2011.
line-edge roughness
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Roughness — is a measure of the texture of a surface. It is quantified by the vertical deviations of a real surface from its ideal form. If these deviations are large, the surface is rough; if they are small the surface is smooth. Roughness is typically… … Wikipedia
edge — Synonyms and related words: A, acerbity, acidity, acidulousness, acme, acridity, acrimony, acuity, aculeate, acuminate, acumination, acuteness, adjoin, advantage, air line, allowance, alpha, anxious, apex, apogee, apprehensive, asperity,… … Moby Thesaurus
Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… … Wikipedia
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
Photoresist — A photoresist is a light sensitive material used in several industrial processes, such as photolithography and photoengraving to form a patterned coating on a surface. Contents 1 Photoresist categories 1.1 Tone 1.2 Developing light wavelength … Wikipedia
Photomask — A photomask. A schematic illustration of a photomask (top) … Wikipedia
LER — may refer to:* Ler books, a loosely connected trilogy about an offshoot of humanity called the Ler by M. A. Foster *Ler, Norway, a village in the municipality of Melhus, Norway *Let em Roll, a pricing game from The Price is Right * Leytonstone… … Wikipedia
Double patterning — is a class of technologies developed for photolithography to enhance the feature density. For the semiconductor industry, double patterning is the only lithography technique to be used for the 32 nm and 22 nm half pitch nodes in 2008 2009 and… … Wikipedia
Nanolithography — Part of a series of articles on Nanoelectronics Single molecule electronics … Wikipedia
Road — This article is about a route, thoroughfare or way that supports travel by a means of conveyance. For a place outside a harbor where a ship can lie at anchor, see Roadstead. For public roads, see Highway. For other routes, see thoroughfare. For… … Wikipedia
steel — steellike, adj. /steel/, n. 1. any of various modified forms of iron, artificially produced, having a carbon content less than that of pig iron and more than that of wrought iron, and having qualities of hardness, elasticity, and strength varying … Universalium
